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  1. --------------------------- Tanner Research, Inc. ---------------------------
  2.                             09-28-90      Jin Luo
  3.  
  4. DRCRULES.DOC : A SUMMARY OF DRC SETUPS
  5. =============================================================================
  6. |      |      |      |     |Exact|Sur- |   Spacing   |      |    *|  MOSIS  |
  7. |Layer1|Layer2|Layer3|Width|Width|round| 1 | 11 | 21 |Lambda|Tech.|  Rules  |
  8. |------|------|------|-----|-----|-----|---|----|----|------|-----|---------|
  9. | Poly |      |      |  X  |     |     |   |    |    |   2  |     |   3.1   |
  10. | Poly2|      |      |  X  |     |     |   |    |    |   2  |  E  |  12.1   |
  11. |Active|      |      |  X  |     |     |   |    |    |   3  |     |   2.1   |
  12. |Metal1|      |      |  X  |     |     |   |    |    |   3  |     |   7.1   |
  13. |Metal2|      |      |  X  |     |     |   |    |    |   3  |     |   9.1   |
  14. |Select|      |      |  X  |     |     |   |    |    |   4  |  e  |         |
  15. | Well |      |      |  X  |     |     |   |    |    |  10  |  e  |   1.1   |
  16. |------|------|------|-----|-----|-----|---|----|----|------|-----|---------|
  17. | Via  |      |      |     |  X  |     |   |    |    |   2  |     |   8.1   |
  18. |ActCon|      |      |     |  X  |     |   |    |    |   2  |     |   6.1   |
  19. |PolCon|      |      |     |  X  |     |   |    |    |   2  |     |   5.1   |
  20. |Poly2C|      |      |     |  X  |     |   |    |    |   2  |  E  |  13.1   |
  21. |------|------|------|-----|-----|-----|---|----|----|------|-----|---------|
  22. | Poly |      |      |     |     |     | X |    |    |   2  |     |   3.2   |
  23. | Poly2|      |      |     |     |     | X |    |    |   3  |  E  |11.2/12.2|
  24. |Active|      |      |     |     |     | X |    |    |   3  |     |   2.2   |
  25. |Metal1|      |      |     |     |     | X |    |    |   3  |     |   7.2   |
  26. |Metal2|      |      |     |     |     | X |    |    |   4  |     |   9.2   |
  27. |Select|      |      |     |     |     | X |    |    |   2  |  e  |   4.4   |
  28. | Well |      |      |     |     |     | X |    |    |   6  |  e  |   1.3   |
  29. |PolCon|      |      |     |     |     | X |    |    |   2  |     |   5.3   |
  30. |Poly2C|      |      |     |     |     | X |    |    |   2  |  E  |  13.2   |
  31. |ActCon|      |      |     |     |     | X |    |    |   2  |     |   6.3   |
  32. | Via  |      |      |     |     |     | X |    |    |   3  |     |   8.2   |
  33. |------|------|------|-----|-----|-----|---|----|----|------|-----|---------|
  34. | Poly |Active|      |     |     |     |   |  X |    |   1  |     |   3.5   |
  35. | Poly2|Active|      |     |     |     |   |  X |    |   1  |  E  |  12.4   |
  36. | Poly | Poly2|      |     |     |     |   |  X |    |   2  |  E  |  12.5   |
  37. |PolCon| Poly2|      |     |     |     |   |  X |    |   3  |  E  |11.5/12.6|
  38. |Poly2C| Poly |      |     |     |     |   |  X |    |   3  |  E  |  13.5   |
  39. |Poly2C|Active|      |     |     |     |   |  X |    |   3  |  E  |  13.5   |
  40. | Via  | Poly |      |     |     |     |   |  X |    |   2  |     |   8.4   |
  41. | Via  | Poly2|      |     |     |     |   |  X |    |   2  |  E  |  13.8   |
  42. | Via  |Active|      |     |     |     |   |  X |    |   2  |     |   8.4   |
  43. | Via  |PolCon|      |     |     |     |   |  X |    |   2  |     |   8.5   |
  44. | Via  |Poly2C|      |     |     |     |   |  X |    |   2  |  E  |  13.7   |
  45. | Via  |ActCon|      |     |     |     |   |  X |    |   2  |     |   8.5   |
  46. | Poly2| Well |      |     |     |     |   |  X |    |   2  |  Ee |  11.4   |
  47. |Active| Well |      |     |     |     |   |  X |    |   3  |  e  |   2.4   |
  48. |------|------|------|-----|-----|-----|---|----|----|------|-----|-------- |
  49. | Poly |Active|ActCon|     |     |     |   |    |  X |   2  |     |   6.4   |
  50. | Poly |Active|PolCon|     |     |     |   |    |  X |   2  |     |   5.4   |
  51. |Active| Well |Select|     |     |     |   |    |  X |   2  |  e  |   4.2   |
  52. |------|------|------|-----|-----|-----|---|----|----|------|-----|---------|
  53. |PolCon| Poly |      |     |     |  X  |   |    |    |   2  |     |   5.2   |
  54. |PolCon|Metal1|      |     |     |  X  |   |    |    |   1  |     | 5.5/7.3 |
  55. |Poly2C| Poly2|      |     |     |  X  |   |    |    |   2  |  E  |  13.4   |
  56. |Poly2C|Metal1|      |     |     |  X  |   |    |    |   1  |  E  |  13.6   |
  57. |ActCon|Active|      |     |     |  X  |   |    |    |   2  |     |   6.2   |
  58. |ActCon|Metal1|      |     |     |  X  |   |    |    |   1  |     | 6.5/7.3 |
  59. | Via  |Metal1|      |     |     |  X  |   |    |    |   1  |     |   8.3   |
  60. | Via  |Metal2|      |     |     |  X  |   |    |    |   1  |     | 8.3/9.3 |
  61. | PBase| Well |      |     |     |  X  |   |    |    |   6  |  eA |  15.5   |
  62. ============================================================================
  63. * Technology codes:
  64.   e : Either Well (rules are set for both types of Well and Select) SCE, SCEA
  65.   E : Electrode (double poly processes)                             SCGE
  66.   A : Low Noise Analog (CCD & Bipolar processes)                    SCGA, SCEA
  67.  
  68.   Rules with no codes are general rules: SCN, SCP, SCG, SCGE, SCGA, SCE, SCEA
  69.