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  1. NM1  PM1  NM2  PM2  NM3   PY1  ML1  ML2  DU1  DU2
  2. *
  3. * Example process file
  4. *
  5. *PROCESS=BSIM 
  6. *RUN=
  7. *WAFER=
  8. *XPOS=6
  9. *YPOS=5
  10. *OPERATOR=Min-Chie
  11. *DATE=July-16-85
  12. *
  13. *   NMOS-1 PARAMETERS  (07-16-85)
  14. *
  15. -1.0087E+000,-2.1402E-001,3.44354E-001
  16. 7.96434E-001,0.00000E+000,0.00000E+000
  17. 1.31191E+000,3.23395E-001,-5.7698E-001
  18. 1.46640E-001,1.68585E-001,-1.8796E-001
  19. -1.0027E-003,-9.4847E-003,1.47316E-002
  20. 5.34334E+002,7.9799E-001,4.7740E-001
  21. 4.38497E-002,6.38105E-002,-6.1053E-002
  22. -5.7332E-002,1.01174E+000,1.62706E-002
  23. 8.25434E+000,-2.4197E+001,1.95696E+001
  24. -7.6911E-004,9.62411E-003,-3.7951E-003
  25. 7.86777E-004,7.35448E-004,-1.7796E-003
  26. 1.06821E-003,-8.0958E-003,4.03379E-003
  27. -1.9209E-002,-7.4573E-002,1.47520E-002
  28. 5.40612E+002,6.21401E+002,-1.9190E+002
  29. -1.2992E+001,-6.4900E+001,4.29043E+001
  30. -9.4035E+000,1.18239E+002,-2.9747E+001
  31. 0.0000E-002,0.00000E-001,0.0000E-002
  32. 3.00000E-002,2.70000E+001,5.00000E+000
  33. **  2.70000E-010,2.70000E-010,1.40000E-010
  34. **  remove the overlap capacitances !!
  35. 0.00000E-000,0.00000E-000,0.00000E-000
  36. 1.0   0.0,   0.0
  37. 0.0,  0.0,   0.0
  38. 0.0,  0.0,   0.0
  39. 0.0,  0.0,   0.0
  40. *
  41. *PROCESS=BSIM 
  42. *RUN=
  43. *WAFER=
  44. *XPOS=6
  45. *YPOS=5
  46. *OPERATOR= TRANSLATED FROM NM1
  47. *         (BY SCALING THE MOBILITY PARAMETERS)
  48. *DATE=July-16-85
  49. *
  50. *   PMOS-1 PARAMETERS  (07-16-85)
  51. *
  52. -1.0087E+000,-2.1402E-001,3.44354E-001
  53. 7.96434E-001,0.00000E+000,0.00000E+000
  54. 1.31191E+000,3.23395E-001,-5.7698E-001
  55. 1.46640E-001,1.68585E-001,-1.8796E-001
  56. -1.0027E-003,-9.4847E-003,1.47316E-002
  57. 1.82193E+002,2.7226E-001,1.6288E-001
  58. 4.38497E-002,6.38105E-002,-6.1053E-002
  59. -5.7332E-002,1.01174E+000,1.62706E-002
  60. 2.81626E+000,-0.8255E+001,0.66768E+001
  61. -7.6911E-004,9.62411E-003,-3.7951E-003
  62. 7.86777E-004,7.35448E-004,-1.7796E-003
  63. 1.06821E-003,-8.0958E-003,4.03379E-003
  64. -1.9209E-002,-7.4573E-002,1.47520E-002
  65. 1.84449E+002,2.12012E+002,-0.6547E+002
  66. -0.4433E+001,-2.2143E+001,1.46383E+001
  67. -3.2083E+000,0.40341E+002,-1.0149E+001
  68. 0.0000E-002,0.00000E-001,0.0000E-002
  69. 3.00000E-002,2.70000E+001,5.00000E+000
  70. **  2.70000E-010,2.70000E-010,1.40000E-010
  71. **  remove the overlap capacitances !!
  72. 0.00000E-000,0.00000E-000,0.00000E-000
  73. 1.0   0.0,   0.0
  74. 0.0,  0.0,   0.0
  75. 0.0,  0.0,   0.0
  76. 0.0,  0.0,   0.0
  77. *
  78. *
  79. *PROCESS=BSIM
  80. *RUN=6,8
  81. *WAFER=1
  82. *XPOS=6
  83. *YPOS=5
  84. *OPERATOR=joey & min
  85. *DATE=3/8/'85
  86. *
  87. *   NMOS-2 PARAMETERS  (03-08-85)
  88. *
  89. -1.0682E+000,-6.7765E-002,4.15888E-001
  90. 7.93602E-001,0.00000E+000,0.00000E+000
  91. 1.38210E+000,1.56889E-001,-6.3435E-001
  92. 1.60163E-001,1.41849E-001,-2.0333E-001
  93. -1.1885E-002,1.33579E-002,2.13053E-002
  94. 5.44582E+002,9.4444E-001,4.4423E-001
  95. 4.02955E-002,5.36003E-002,-5.1224E-002
  96. 2.01256E-001,4.30621E-001,-1.5909E-001
  97. -1.1522E+000,-2.5360E+000,2.48135E+001
  98. -3.0525E-003,1.40355E-002,-2.1259E-003
  99. 2.33703E-003,-1.9621E-003,-3.0147E-003
  100. -1.5014E-003,-1.7938E-003,5.04494E-003
  101. -9.6961E-002,9.68463E-002,6.56404E-002
  102. 5.95572E+002,4.75833E+002,-2.3062E+002
  103. -7.7819E+001,7.75110E+001,8.19963E+001
  104. -1.8177E+001,1.23358E+002,-1.9316E+001
  105. 0.0000E-003,0.00000E-002,0.0000E-002
  106. 3.20000E-002,2.70000E+001,5.00000E+000
  107. 2.69000E-010,2.69000E-010,2.34000E-010
  108. 1.0,   0.0,   0.0
  109. 0.0,   0.0,   0.0
  110. 0.0,   0.0,   0.0
  111. 0.0,   0.0,   0.0
  112. *
  113. *   PMOS-2 PARAMETERS  (03-08-85)
  114. *
  115. -2.1389E-001,3.36471E-002,2.20237E-001
  116. 6.97239E-001,0.00000E+000,0.00000E+000
  117. 5.95618E-001,-9.7957E-002,-8.1902E-002
  118. -2.0029E-002,1.97751E-002,-4.0038E-002
  119. -1.4030E-002,3.62814E-002,1.44720E-002
  120. 1.82193E+002,8.6560E-001,5.7444E-001
  121. 1.12067E-001,9.28463E-002,-8.8985E-002
  122. 2.39431E-002,8.89483E-002,1.05634E-002
  123. 7.51914E+000,-1.8327E+000,3.98658E+000
  124. -1.3199E-003,4.00836E-003,1.97847E-004
  125. 5.70255E-004,-1.2309E-003,-2.3082E-003
  126. 5.07623E-003,-1.8537E-004,1.76966E-003
  127. -1.2781E-002,1.14420E-002,6.36308E-003
  128. 1.89043E+002,8.64555E+001,-3.4304E+001
  129. 4.09098E+000,3.51921E+000,4.49145E+000
  130. 6.71879E-001,7.66627E+000,-1.5826E+000
  131. 0.0000E-003,0.00000E-003,0.0000E-003
  132. 3.20000E-002,2.70000E+001,5.00000E+000
  133. 4.39000E-010,4.39000E-010,2.34000E-010
  134. 1.0,   0.0,   0.0
  135. 0.0,   0.0,   0.0
  136. 0.0,   0.0,   0.0
  137. 0.0,   0.0,   0.0
  138. *
  139. *PROCESS=BSIM 
  140. *RUN=
  141. *WAFER=
  142. *XPOS=6
  143. *YPOS=5
  144. *OPERATOR= TRANSLATED FROM NM1
  145. *         (BY SHIFTING VFB --- THE SIZE-INDEP. TERM ONLY)
  146. *DATE=July-16-85
  147. *
  148. *   NMOS-3 PARAMETERS  (DEPLETION-MODE)  (07-16-85)
  149. *
  150. -5.6087E+000,-2.1402E-001,3.44354E-001
  151. ** -1.0087E+000,-2.1402E-001,3.44354E-001
  152. 7.96434E-001,0.00000E+000,0.00000E+000
  153. 1.31191E+000,3.23395E-001,-5.7698E-001
  154. 1.46640E-001,1.68585E-001,-1.8796E-001
  155. -1.0027E-003,-9.4847E-003,1.47316E-002
  156. 5.34334E+002,7.9799E-001,4.7740E-001
  157. 4.38497E-002,6.38105E-002,-6.1053E-002
  158. -5.7332E-002,1.01174E+000,1.62706E-002
  159. 8.25434E+000,-2.4197E+001,1.95696E+001
  160. -7.6911E-004,9.62411E-003,-3.7951E-003
  161. 7.86777E-004,7.35448E-004,-1.7796E-003
  162. 1.06821E-003,-8.0958E-003,4.03379E-003
  163. -1.9209E-002,-7.4573E-002,1.47520E-002
  164. 5.40612E+002,6.21401E+002,-1.9190E+002
  165. -1.2992E+001,-6.4900E+001,4.29043E+001
  166. -9.4035E+000,1.18239E+002,-2.9747E+001
  167. 0.0000E-002,0.00000E-001,0.0000E-002
  168. 3.00000E-002,2.70000E+001,5.00000E+000
  169. **  2.70000E-010,2.70000E-010,1.40000E-010
  170. **  remove the overlap capacitances !!
  171. 0.00000E-000,0.00000E-000,0.00000E-000
  172. 1.0   0.0,   0.0
  173. 0.0,  0.0,   0.0
  174. 0.0,  0.0,   0.0
  175. 0.0,  0.0,   0.0
  176. *
  177. **************************************
  178. **************************************
  179. *
  180. *   poly layer-1
  181. *
  182. 30.0,  7.0E-5,   0,        0,      0
  183. 0,     0,        0,        0,      0
  184. *
  185. *   metal layer-1 
  186. *
  187. 0.040, 2.60E-5,  0,        0,      0
  188. 0,     0,        0,        0,      0
  189. *
  190. *   metal layer-2 (top metal)
  191. *
  192. 0.030, 1.3E-5,   0,        0,      0
  193. 0,     0,        0,        0,      0
  194. *
  195. *   n+ diffusion layer
  196. *
  197. 35.0,  2.75E-4,  1.90E-10, 1.0E-5, 0.7
  198. 0.8,   0.5,      0.33,     0,      0
  199. *
  200. *   p+ diffusion layer
  201. *
  202. 120.0, 3.1E-4,   3.0E-010, 1.0E-5, 0.7
  203. 0.8,   0.5,      0.33,     0,      0
  204.